Inventor

VAN DER HEIJDEN ROBERTUS WILHELMUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER HEIJDEN ROBERTUS WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US10324379B2Jun 18, 2019

Lithographic apparatus and method

ASML NETHERLANDS BV3 citations67

US11669017B2Jun 6, 2023

Method for controlling a manufacturing apparatus and associated apparatuses

ASML NETHERLANDS BV1 citations57

DOYTCHEVA MAYA ANGELOVA

1 patent

US8329366B2Dec 11, 2012

Apparatus and method for providing resist alignment marks in a double patterning lithographic process

DOYTCHEVA MAYA ANGELOVA0 citations42