Inventor
LEE HOON SANG
KR5 patents
⚠️ This page may combine multiple inventors who share the name “LEE HOON SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS9390923B2Jul 12, 2016
Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process
APPLIED MATERIALS INC3 citations68
US9064812B2Jun 23, 2015
Aspect ratio dependent etch (ARDE) lag reduction process by selective oxidation with inert gas sputtering
APPLIED MATERIALS INC6 citations68
US9418867B2Aug 16, 2016
Mask passivation using plasma
APPLIED MATERIALS INC2 citations55
US9627216B2Apr 18, 2017
Method for forming features in a silicon containing layer
APPLIED MATERIALS INC0 citations37