Inventor
YOO JEONG HYUN
KR3 patents
Patents
3 patentsUS9287124B2Mar 15, 2016
Method of etching a boron doped carbon hardmask
APPLIED MATERIALS INC8 citations77
US9390923B2Jul 12, 2016
Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process
APPLIED MATERIALS INC3 citations68
US9418867B2Aug 16, 2016
Mask passivation using plasma
APPLIED MATERIALS INC2 citations55