Inventor
MIYOSHI SEIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MIYOSHI SEIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
11 patentsUS6025117AFeb 15, 2000
Method of forming a pattern using polysilane
TOSHIBA KK423 citations98
US6270948B1Aug 7, 2001
Method of forming pattern
TOSHIBA KK54 citations92
US6576375B1Jun 10, 2003
Photomask
TOSHIBA KK24 citations90
US7779777B2Aug 24, 2010
Substrate processing apparatus and method
TOSHIBA KK9 citations84
US9202763B2Dec 1, 2015
Defect pattern evaluation method, defect pattern evaluation apparatus, and recording media
TOSHIBA KK2 citations61
US7973907B2Jul 5, 2011
Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate
TOSHIBA KK0 citations52
US9576100B2Feb 21, 2017
Pattern data generation method, pattern verification method, and optical image calculation method
TOSHIBA KK0 citations50
US8984454B2Mar 17, 2015
Pattern data generation method, pattern verification method, and optical image calculation method
TOSHIBA KK0 citations50
US9547743B2Jan 17, 2017
Manufacturing method for a semiconductor device, pattern generating method and nontransitory computer readable medium storing a pattern generating program
TOSHIBA KK0 citations45
US7985685B2Jul 26, 2011
Method of manufacturing semiconductor device
TOSHIBA KK0 citations40
US9070559B2Jun 30, 2015
Pattern forming method and method of manufacturing semiconductor device
TOSHIBA KK0 citations35