Inventor

KIKU ATSUNORI

JP2 patents

Patents

2 patents

US7258485B2Aug 21, 2007

X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer

RIGAKU DENKI CO LTD47 citations89

US9658174B2May 23, 2017

X-ray topography apparatus

RIGAKU DENKI CO LTD10 citations82