Inventor
SIMMONS MICHAEL E
US12 patents
⚠️ This page may combine multiple inventors who share the name “SIMMONS MICHAEL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CASCADE MICROTECH INC
4 patentsUS10062597B2Aug 28, 2018
High voltage chuck for a probe station
CASCADE MICROTECH INC2 citations70
US9741599B2Aug 22, 2017
High voltage chuck for a probe station
CASCADE MICROTECH INC2 citations70
US9991152B2Jun 5, 2018
Wafer-handling end effectors with wafer-contacting surfaces and sealing structures
CASCADE MICROTECH INC3 citations68
US10060950B2Aug 28, 2018
Shielded probe systems
CASCADE MICROTECH INC1 citations46
FORMFACTOR INC
3 patentsUS11874301B2Jan 16, 2024
Probe systems including imaging devices with objective lens isolators, and related methods
FORMFACTOR INC0 citations46
US11131709B2Sep 28, 2021
Probe systems for optically probing a device under test and methods of operating the probe systems
FORMFACTOR INC0 citations44
US11047795B2Jun 29, 2021
Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems
FORMFACTOR INC0 citations43