Inventor
OEFNER HELMUT
DE24 patents
Patents
24 patentsUS9245811B2Jan 26, 2016
Method for postdoping a semiconductor wafer
INFINEON TECHNOLOGIES AG7 citations83
US9972704B2May 15, 2018
Method for forming a semiconductor device and a semiconductor device
INFINEON TECHNOLOGIES AG2 citations73
US9559020B2Jan 31, 2017
Method for postdoping a semiconductor wafer
INFINEON TECHNOLOGIES AG2 citations72
US9779931B2Oct 3, 2017
Method of manufacturing semiconductor wafers and method of manufacturing a semiconductor device
INFINEON TECHNOLOGIES AG2 citations71
US10273597B2Apr 30, 2019
Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device
INFINEON TECHNOLOGIES AG2 citations70
US12211703B2Jan 28, 2025
Methods for forming a semiconductor device having a second semiconductor layer on a first semiconductor layer
INFINEON TECHNOLOGIES AG0 citations62
US11742215B2Aug 29, 2023
Methods for forming a semiconductor device
INFINEON TECHNOLOGIES AG1 citations62
US10529838B2Jan 7, 2020
Semiconductor device having a variable carbon concentration
INFINEON TECHNOLOGIES AG1 citations62
US10957767B2Mar 23, 2021
Semiconductor device, silicon wafer and method of manufacturing a silicon wafer
INFINEON TECHNOLOGIES AG0 citations61
US10566198B2Feb 18, 2020
Doping method
INFINEON TECHNOLOGIES AG0 citations52
US10319599B2Jun 11, 2019
Methods of planarizing SiC surfaces
INFINEON TECHNOLOGIES AG0 citations52
US10026816B2Jul 17, 2018
Semiconductor wafer and manufacturing method
INFINEON TECHNOLOGIES AG0 citations52
US9972488B2May 15, 2018
Method of reducing defects in an epitaxial layer
INFINEON TECHNOLOGIES AG0 citations52
US9721907B2Aug 1, 2017
Wafer edge shape for thin wafer processing
INFINEON TECHNOLOGIES AG1 citations52
US9312120B2Apr 12, 2016
Method for processing an oxygen containing semiconductor body
INFINEON TECHNOLOGIES AG1 citations52
US10566424B2Feb 18, 2020
Semiconductor device, silicon wafer and method of manufacturing a silicon wafer
INFINEON TECHNOLOGIES AG0 citations51
US9934988B2Apr 3, 2018
Method for processing a silicon wafer
INFINEON TECHNOLOGIES AG0 citations50
US9754787B2Sep 5, 2017
Method for treating a semiconductor wafer
INFINEON TECHNOLOGIES AG1 citations50
US9536838B1Jan 3, 2017
Single crystal ingot, semiconductor wafer and method of manufacturing semiconductor wafers
INFINEON TECHNOLOGIES AG1 citations50
US10837120B2Nov 17, 2020
Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device
INFINEON TECHNOLOGIES AG0 citations49
US10724149B2Jul 28, 2020
Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device
INFINEON TECHNOLOGIES AG0 citations49
US10317338B2Jun 11, 2019
Method and assembly for determining the carbon content in silicon
INFINEON TECHNOLOGIES AG0 citations49
US10014400B2Jul 3, 2018
Semiconductor device having a defined oxygen concentration
INFINEON TECHNOLOGIES AG1 citations49
US9728395B2Aug 8, 2017
Method for manufacturing a semiconductor wafer, and semiconductor device having a low concentration of interstitial oxygen
INFINEON TECHNOLOGIES AG0 citations49