Inventor

NAKAUCHI TATSUYA

JP3 patents

Patents

3 patents

US10344184B2Jul 9, 2019

Polishing composition

NITTA HAAS INC0 citations44

US10077380B2Sep 18, 2018

Polishing composition

NITTA HAAS INC0 citations44

US10249486B2Apr 2, 2019

Method for polishing semiconductor substrate

NITTA HAAS INC0 citations33