Inventor
CHO TOM
US15 patents
Patents
15 patentsUS5885356AMar 23, 1999
Method of reducing residue accumulation in CVD chamber using ceramic lining
APPLIED MATERIALS INC154 citations98
US5558717ASep 24, 1996
CVD Processing chamber
APPLIED MATERIALS INC1,163 citations98
US5853607ADec 29, 1998
CVD processing chamber
APPLIED MATERIALS INC91 citations96
US5441568AAug 15, 1995
Exhaust baffle for uniform gas flow pattern
APPLIED MATERIALS INC95 citations94
US9850568B2Dec 26, 2017
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC11 citations92
US7663121B2Feb 16, 2010
High efficiency UV curing system
APPLIED MATERIALS INC38 citations92
US6192829B1Feb 27, 2001
Antenna coil assemblies for substrate processing chambers
APPLIED MATERIALS INC26 citations89
US10119188B2Nov 6, 2018
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC8 citations84
US11053581B2Jul 6, 2021
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC2 citations73
US10501843B2Dec 10, 2019
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC3 citations73
US9865434B2Jan 9, 2018
Rare-earth oxide based erosion resistant coatings for semiconductor application
APPLIED MATERIALS INC5 citations73
US10418229B2Sep 17, 2019
Aerosol deposition coating for semiconductor chamber components
APPLIED MATERIALS INC3 citations71
US9708713B2Jul 18, 2017
Aerosol deposition coating for semiconductor chamber components
APPLIED MATERIALS INC5 citations71
US11680308B2Jun 20, 2023
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC0 citations62
US10734202B2Aug 4, 2020
Rare-earth oxide based erosion resistant coatings for semiconductor application
APPLIED MATERIALS INC1 citations62