Inventor
YEN WEI-CHUN
TW9 patents
⚠️ This page may combine multiple inventors who share the name “YEN WEI-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS12007694B2Jun 11, 2024
Lithography apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations74
US10678138B2Jun 9, 2020
Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12520385B2Jan 6, 2026
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12510827B2Dec 30, 2025
EUV radiation source apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12449734B2Oct 21, 2025
Lithography apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11513441B2Nov 29, 2022
EUV radiation source apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12066761B2Aug 20, 2024
Inspection tool for an extreme ultraviolet radiation source to observe tin residual
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10955750B2Mar 23, 2021
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51