Inventor
GOLZARIAN REZA M
US14 patents
⚠️ This page may combine multiple inventors who share the name “GOLZARIAN REZA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
8 patentsUS6976907B2Dec 20, 2005
Polishing pad conditioning
INTEL CORP29 citations92
US6875086B2Apr 5, 2005
Surface planarization
INTEL CORP26 citations92
US7084053B2Aug 1, 2006
Unidirectionally conductive materials for interconnection
INTEL CORP5 citations73
US7153760B2Dec 26, 2006
Using acoustic energy including two lasers to activate implanted species
INTEL CORP10 citations72
US7405419B2Jul 29, 2008
Unidirectionally conductive materials for interconnection
INTEL CORP1 citations51
US7156947B2Jan 2, 2007
Energy enhanced surface planarization
INTEL CORP1 citations50
US7229484B2Jun 12, 2007
Pre-coated particles for chemical mechanical polishing
INTEL CORP0 citations45
US7097536B2Aug 29, 2006
Electrically enhanced surface planarization
INTEL CORP0 citations40
BASF SE
6 patentsUS11264250B2Mar 1, 2022
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates
BASF SE2 citations71
US10899945B2Jan 26, 2021
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates
BASF SE3 citations71
US10738219B2Aug 11, 2020
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates
BASF SE0 citations50
US12351737B2Jul 8, 2025
Chemical mechanical polishing of substrates containing copper and ruthenium
BASF SE0 citations49
US11993729B2May 28, 2024
Chemical mechanical polishing composition
BASF SE0 citations49
US11725117B2Aug 15, 2023
Chemical mechanical polishing of substrates containing copper and ruthenium
BASF SE0 citations49