Inventor
CIBERE JOSEPH
CA21 patents
⚠️ This page may combine multiple inventors who share the name “CIBERE JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
11 patentsUS11255606B2Feb 22, 2022
Gas flow control for millisecond anneal system
MATTSON TECH INC5 citations71
US10966286B2Mar 30, 2021
Nitrogen injection for ARC lamps
MATTSON TECH INC3 citations70
US11810802B2Nov 7, 2023
Substrate support in a millisecond anneal system
MATTSON TECH INC0 citations62
US11721539B2Aug 8, 2023
Arc lamp with forming gas for thermal processing systems
MATTSON TECH INC0 citations61
US11644817B2May 9, 2023
Control system for adaptive control of a thermal processing system
MATTSON TECH INC0 citations61
US12120780B2Oct 15, 2024
Nitrogen injection for arc lamps
MATTSON TECH INC0 citations59
US10734262B2Aug 4, 2020
Substrate support in a millisecond anneal system
MATTSON TECH INC0 citations51
US10388552B2Aug 20, 2019
Substrate breakage detection in a thermal processing system
MATTSON TECH INC0 citations51
US10242894B2Mar 26, 2019
Substrate breakage detection in a thermal processing system
MATTSON TECH INC0 citations51
US9941144B2Apr 10, 2018
Substrate breakage detection in a thermal processing system
MATTSON TECH INC0 citations51
US12535273B2Jan 27, 2026
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations48
CAMM DAVID MALCOLM
4 patentsUS9070590B2Jun 30, 2015
Workpiece breakage prevention method and apparatus
CAMM DAVID MALCOLM11 citations82
US8454356B2Jun 4, 2013
Systems and methods for supporting a workpiece during heat-treating
CAMM DAVID MALCOLM11 citations82
US9627244B2Apr 18, 2017
Methods and systems for supporting a workpiece and for heat-treating the workpiece
CAMM DAVID MALCOLM10 citations79
US8434341B2May 7, 2013
Methods and systems for supporting a workpiece and for heat-treating the workpiece
CAMM DAVID MALCOLM6 citations79
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD
4 patentsUS12174616B2Dec 24, 2024
Control system for adaptive control of a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations61
US12119216B2Oct 15, 2024
Arc lamp with forming gas for thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations61
US12183558B2Dec 31, 2024
Workpiece processing apparatus with thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59
US11837447B2Dec 5, 2023
Workpiece processing apparatus with plasma and thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59