Inventor
SCHORR NICOLAS
DE3 patents
Patents
3 patentsUS11130672B2Sep 28, 2021
Micromechanical device and corresponding production method
BOSCH GMBH ROBERT2 citations66
US12404170B2Sep 2, 2025
Method for producing a bonding pad for a micromechanical sensor element
BOSCH GMBH ROBERT0 citations44
US12094717B2Sep 17, 2024
Method for forming a trench in a first semiconductor layer of a multi-layer system
BOSCH GMBH ROBERT0 citations41