Inventor

KALUTARAGE LAKMAL C

US19 patents

⚠️ This page may combine multiple inventors who share the name “KALUTARAGE LAKMAL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KALUTARAGE LAKMAL C

APPLIED MATERIALS INC

Methods for selective dry etching gallium oxide

Methods for selective deposition of dielectric on silicon oxide

Methods for depositing blocking layers on metal surfaces

Methods for depositing blocking layers on metal surfaces

Methods for depositing blocking layers on conductive surfaces

Methods for selective dry etching gallium oxide

Methods for depositing blocking layers on conductive surfaces

Low-k dielectric films

Deposition of flowable silicon-containing films

Systems and methods for depositing low-K dielectric films

Low temperature molecular layer deposition of SiCON

Reducing agents for atomic layer deposition

Gap-fill with aluminum-containing films

Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing

Methods and apparatus for depositing yttrium-containing films

Methods for depositing silicon nitride

UNIV WAYNE STATE

Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films

Precursors for atomic layer deposition

Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition