Inventor
SALY MARK J
US15 patents
⚠️ This page may combine multiple inventors who share the name “SALY MARK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS11398388B2Jul 26, 2022
Methods for selective dry etching gallium oxide
APPLIED MATERIALS INC2 citations71
US12469715B2Nov 11, 2025
Dry etching with etch byproduct self-cleaning
APPLIED MATERIALS INC0 citations62
US12394620B2Aug 19, 2025
Benzyl compound passivation for selective deposition and selective etch protection
APPLIED MATERIALS INC0 citations62
US12014925B2Jun 18, 2024
Metal-doped carbon hardmasks
APPLIED MATERIALS INC0 citations62
US12486559B2Dec 2, 2025
Method of metal oxide infiltration into photoresist
APPLIED MATERIALS INC0 citations61
US12438050B2Oct 7, 2025
Electronic device fabrication using area-selective deposition
APPLIED MATERIALS INC0 citations60
US12338547B2Jun 24, 2025
Method for forming silicon-phosphorous materials
APPLIED MATERIALS INC0 citations60
US12305275B2May 20, 2025
Corrosion resistant film on a chamber component and methods of depositing thereof
APPLIED MATERIALS INC0 citations60
US11942330B2Mar 26, 2024
Methods for selective dry etching gallium oxide
APPLIED MATERIALS INC0 citations60
US11932938B2Mar 19, 2024
Corrosion resistant film on a chamber component and methods of depositing thereof
APPLIED MATERIALS INC0 citations60
US11649560B2May 16, 2023
Method for forming silicon-phosphorous materials
APPLIED MATERIALS INC0 citations60
US12315733B2May 27, 2025
Enhanced etch selectivity using halides
APPLIED MATERIALS INC0 citations58
US11107674B2Aug 31, 2021
Methods for depositing silicon nitride
APPLIED MATERIALS INC0 citations50
US11536708B2Dec 27, 2022
Methods to fabricate dual pore devices
APPLIED MATERIALS INC0 citations46