Inventor
ISHIBASHI SHOTA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ISHIBASHI SHOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS11742190B2Aug 29, 2023
Sputtering apparatus and film forming method
TOKYO ELECTRON LTD0 citations60
US11715671B2Aug 1, 2023
Film forming system, magnetization characteristic measuring device, and film forming method
TOKYO ELECTRON LTD0 citations60
US12488970B2Dec 2, 2025
Film forming apparatus and method of controlling film forming apparatus
TOKYO ELECTRON LTD0 citations50
US12027353B2Jul 2, 2024
Substrate processing method and apparatus
TOKYO ELECTRON LTD0 citations50
US12014911B2Jun 18, 2024
Sputtering apparatus
TOKYO ELECTRON LTD0 citations50
US11851750B2Dec 26, 2023
Apparatus and method for performing sputtering process
TOKYO ELECTRON LTD0 citations50
US11479848B2Oct 25, 2022
Film forming apparatus and method
TOKYO ELECTRON LTD0 citations50
US11705315B2Jul 18, 2023
Sputtering apparatus and sputtering method
TOKYO ELECTRON LTD0 citations49
US12486565B2Dec 2, 2025
Sputtering apparatus and control method
TOKYO ELECTRON LTD0 citations48
US11776817B2Oct 3, 2023
Pattern forming method
TOKYO ELECTRON LTD0 citations48