Inventor
CHUNG CHE-LIANG
TW6 patents
Patents
6 patentsUS10164053B1Dec 25, 2018
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD18 citations83
US9802292B2Oct 31, 2017
Advanced polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US11951587B2Apr 9, 2024
Zone-based CMP target control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12068196B2Aug 20, 2024
Forming gate line-end of semiconductor structures with improved metal gate height
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10943822B2Mar 9, 2021
Forming gate line-end of semiconductor structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10160088B2Dec 25, 2018
Advanced polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations46