Inventor
LIU CHIH-WEN
TW12 patents
⚠️ This page may combine multiple inventors who share the name “LIU CHIH-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS11951587B2Apr 9, 2024
Zone-based CMP target control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12068196B2Aug 20, 2024
Forming gate line-end of semiconductor structures with improved metal gate height
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10943822B2Mar 9, 2021
Forming gate line-end of semiconductor structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US9941109B2Apr 10, 2018
Surface treatment in a chemical mechanical process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9922837B2Mar 20, 2018
Asymmetric application of pressure to a wafer during a CMP process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10800004B2Oct 13, 2020
System and method of chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12128455B2Oct 29, 2024
Electrical cleaning tool for wafer polishing tool system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47