Inventor
CHANG CHAO-HSIN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHAO-HSIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
12 patentsUS6017771AJan 25, 2000
Method and system for yield loss analysis by yield management system
TAIWAN SEMICONDUCTOR MFG80 citations94
US5877064AMar 2, 1999
Method for marking a wafer
TAIWAN SEMICONDUCTOR MFG30 citations92
US5874309AFeb 23, 1999
Method for monitoring metal corrosion on integrated circuit wafers
TAIWAN SEMICONDUCTOR MFG20 citations92
US5783097AJul 21, 1998
Process to avoid dielectric damage at the flat edge of the water
TAIWAN SEMICONDUCTOR MFG28 citations92
US5783493AJul 21, 1998
Method for reducing precipitate defects using a plasma treatment post BPSG etchback
TAIWAN SEMICONDUCTOR MFG43 citations91
US6389323B1May 14, 2002
Method and system for yield loss analysis by yield management system
TAIWAN SEMICONDUCTOR MFG26 citations90
US7003365B1Feb 21, 2006
System and method of reserving capacity for a pre-process order
TAIWAN SEMICONDUCTOR MFG12 citations81
US6261843B1Jul 17, 2001
Test pattern for monitoring metal corrosion on integrated circuit wafers
TAIWAN SEMICONDUCTOR MFG6 citations73
US6308576B1Oct 30, 2001
Method for determining stress effect on a film during scrubber clean
TAIWAN SEMICONDUCTOR MFG3 citations60
US6153497ANov 28, 2000
Method for determining a cause for defects in a film deposited on a wafer
TAIWAN SEMICONDUCTOR MFG3 citations60
US6728586B2Apr 27, 2004
Microelectronic fabrication production control method and system providing enhanced microelectronic fabrication facility utilization flexibility
TAIWAN SEMICONDUCTOR MFG3 citations57
US6500680B1Dec 31, 2002
Service code system and method for scheduling fabrication facility utilization
TAIWAN SEMICONDUCTOR MFG4 citations56