Inventor
WU YU-YI
TW5 patents
⚠️ This page may combine multiple inventors who share the name “WU YU-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6938505B2Sep 6, 2005
Chamber wafer detection
TAIWAN SEMICONDUCTOR MFG29 citations89
US7117058B2Oct 3, 2006
Automatic statistical process control (SPC) chart generation apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG55 citations87
US6965432B2Nov 15, 2005
Non-invasive wafer transfer position diagnosis and calibration
TAIWAN SEMICONDUCTOR MFG2 citations54