Inventor
MORI HIROTOSHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “MORI HIROTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS9136150B2Sep 15, 2015
Substrate processing apparatus, substrate processing method and non-transitory storage medium
TOKYO ELECTRON LTD6 citations71
US12230540B2Feb 18, 2025
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US12020936B2Jun 25, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations51
US12525453B2Jan 13, 2026
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations50
US12415230B2Sep 16, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12397375B2Aug 26, 2025
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations50
US12377497B2Aug 5, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12191168B2Jan 7, 2025
Laser processing device, laser processing system and laser processing method
TOKYO ELECTRON LTD0 citations50
US12087588B2Sep 10, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12076820B2Sep 3, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12070820B2Aug 27, 2024
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations50
US12142483B2Nov 12, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations49
US11969827B2Apr 30, 2024
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations48