Inventor
BUIGUEZ FRANCOIS
4 patents
Patents
4 patentsUS4636281AJan 13, 1987
Process for the autopositioning of a local field oxide with respect to an insulating trench
COMMISSARIAT ENERGIE ATOMIQUE158 citations96
US4770977ASep 13, 1988
Silicon-containing polymer and its use as a masking resin in a lithography process
COMMISSARIAT ENERGIE ATOMIQUE28 citations90
US4689288AAug 25, 1987
Photosensitive film based on silicon-containing polymer and its use as a masking resin in a lithography process
COMMISSARIAT ENERGIE ATOMIQUE27 citations90
US4124474ANov 7, 1978
Method and apparatus for controlling the deposition of films by reactive sputtering
COMMISSARIAT ENERGIE ATOMIQUE27 citations75