Inventor
PECCOUD LOUISE
5 patents
Patents
5 patentsUS5105761AApr 21, 1992
Diffusion plasma-assisted chemical treatment apparatus
COMMISSARIAT ENERGIE ATOMIQUE123 citations95
US4491496AJan 1, 1985
Enclosure for the treatment, and particularly for the etching of substrates by the reactive plasma method
COMMISSARIAT ENERGIE ATOMIQUE121 citations93
US5047115ASep 10, 1991
Process for etching by gas plasma
COMMISSARIAT ENERGIE ATOMIQUE62 citations92
US4124474ANov 7, 1978
Method and apparatus for controlling the deposition of films by reactive sputtering
COMMISSARIAT ENERGIE ATOMIQUE27 citations75
US4990859AFeb 5, 1991
Process and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box and application to the regulation of the impedance or the ionic current in such reactor
COMMISSARIAT ENERGIE ATOMIQUE12 citations62