Inventor
BUSCHHARDT THOMAS
DE17 patents
⚠️ This page may combine multiple inventors who share the name “BUSCHHARDT THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILTRONIC AG
8 patentsUS7938911B2May 10, 2011
Process for cleaning a semiconductor wafer using a cleaning solution
SILTRONIC AG8 citations81
US7541287B2Jun 2, 2009
Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method
SILTRONIC AG3 citations61
US7538008B2May 26, 2009
Method for producing a layer structure
SILTRONIC AG2 citations61
US11059072B2Jul 13, 2021
Screen plate for screening plants for mechanical classification of polysilicon
SILTRONIC AG1 citations56
US11154908B2Oct 26, 2021
Separating apparatus for polysilicon
SILTRONIC AG1 citations51
US8580046B2Nov 12, 2013
Method for the treatment of a semiconductor wafer
SILTRONIC AG0 citations49
US8372213B2Feb 12, 2013
Method for the treatment of a semiconductor wafer
SILTRONIC AG0 citations49
US8647173B2Feb 11, 2014
Method for polishing a semiconductor wafer
SILTRONIC AG0 citations39
WACKER SILTRONIC HALBLEITERMAT
3 patentsUS5980361ANov 9, 1999
Method and device for polishing semiconductor wafers
WACKER SILTRONIC HALBLEITERMAT54 citations92
US6530826B2Mar 11, 2003
Process for the surface polishing of silicon wafers
WACKER SILTRONIC HALBLEITERMAT35 citations90
US6095898AAug 1, 2000
Process and device for polishing semiconductor wafers
WACKER SILTRONIC HALBLEITERMAT51 citations89
SCHWANDNER JUERGEN
3 patentsUS8647985B2Feb 11, 2014
Method for polishing a substrate composed of semiconductor material
SCHWANDNER JUERGEN6 citations71
US8721390B2May 13, 2014
Method for the double-side polishing of a semiconductor wafer
SCHWANDNER JUERGEN3 citations60
US8685270B2Apr 1, 2014
Method for producing a semiconductor wafer
SCHWANDNER JUERGEN0 citations40