Inventor

LUTHE HANS-JOACHIM

DE4 patents

⚠️ This page may combine multiple inventors who share the name “LUTHE HANS-JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WACKER SILTRONIC HALBLEITERMAT

2 patents

US6503335B2Jan 7, 2003

Centrifuge and method for centrifuging a semiconductor wafer

WACKER SILTRONIC HALBLEITERMAT25 citations86

US6412500B1Jul 2, 2002

Device and method for cleaning semiconductor wafers

WACKER SILTRONIC HALBLEITERMAT11 citations68

SILTRONIC AG

2 patents

US8580046B2Nov 12, 2013

Method for the treatment of a semiconductor wafer

SILTRONIC AG0 citations49

US8372213B2Feb 12, 2013

Method for the treatment of a semiconductor wafer

SILTRONIC AG0 citations49