Inventor
CLASS WALTER H
US7 patents
⚠️ This page may combine multiple inventors who share the name “CLASS WALTER H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATERIALS RESEARCH CORP
6 patentsUS4422896ADec 27, 1983
Magnetically enhanced plasma process and apparatus
MATERIALS RESEARCH CORP102 citations94
US4581118AApr 8, 1986
Shaped field magnetron electrode
MATERIALS RESEARCH CORP75 citations92
US4525262AJun 25, 1985
Magnetron reactive bias sputtering method and apparatus
MATERIALS RESEARCH CORP35 citations92
US4198283AApr 15, 1980
Magnetron sputtering target and cathode assembly
MATERIALS RESEARCH CORP100 citations92
US4472259ASep 18, 1984
Focusing magnetron sputtering apparatus
MATERIALS RESEARCH CORP49 citations91
US4428816AJan 31, 1984
Focusing magnetron sputtering apparatus
MATERIALS RESEARCH CORP27 citations90