Inventor
ARONSON ARNOLD J
US3 patents
Patents
3 patentsUS4994162AFeb 19, 1991
Planarization method
MATERIALS RESEARCH CORP63 citations93
US4472259ASep 18, 1984
Focusing magnetron sputtering apparatus
MATERIALS RESEARCH CORP49 citations91
US5174875ADec 29, 1992
Method of enhancing the performance of a magnetron sputtering target
MATERIALS RESEARCH CORP53 citations90