Inventor

MARKLE DAVID A

US71 patents

⚠️ This page may combine multiple inventors who share the name “MARKLE DAVID A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARKLE DAVID A

ULTRATECH INC

Laser scanning apparatus and methods for thermal processing

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

Laser thermal annealing of lightly doped silicon substrates

Laser thermal processing with laser diode radiation

Laser thermal annealing of lightly doped silicon substrates

Method of thermal processing a substrate with direct and redirected reflected radiation

Laser scanning apparatus and methods for thermal processing

Methods for annealing a substrate and article produced by such methods

Apparatus and methods for thermal reduction of optical distortion

Laser thermal annealing of lightly doped silicon substrates

Methods and apparatus for temperature measurement and control on a remote substrate surface

Processing substrates using direct and recycled radiation

Laser thermal annealing of lightly doped silicon substrates

Heated chuck for laser thermal processing

Methods and apparatus for truncating an image formed with coherent radiation

Methods and apparatus for irradiating a substrate to avoid substrate edge damage

Computer architecture for and method of high-resolution imaging using a low-resolution image transducer

ULTRATECH STEPPER INC

Laser scanning apparatus and methods for thermal processing

Apparatus having line source of radiant energy for exposing a substrate

Thermally induced phase switch for laser thermal processing

Magnetically positioned X-Y stage having six degrees of freedom

Magnetically positioned X-Y stage having six degrees of freedom

Magnetically-positioned X-Y stage having six-degrees of freedom

Point diffraction interferometer and pin mirror for use therewith

Lithography system and method for device manufacture

Pattern recognition alignment system

System and method for reducing colinearity effects in manufacturing microdevices

Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrate

Methods for determining wavelength and pulse length of radiant energy used for annealing

Beamsplitter in single fold optical system and optical variable magnification method and system

Method of and apparatus for defining disk tracks in magnetic recording media

Motion compensation system and method for lithography

Arbitrarily wide lens array with an image field to span the width of a substrate

PERKIN ELMER CORP

System for illuminating an annular field

Optical projection and scanning apparatus

Optical projection apparatus

Optical lithographic system

Alignment and focusing system for a scanning mask aligner

Wafer alignment device

Three-fold mirror assembly for a scanning projection system

Automatic wafer focusing and flattening system

Automatic mask alignment

GEN SIGNAL CORP

Unit magnification optical system with improved reflective reticle

Unit magnification optical system

Optical reticle inspection system and method

Apparatus and method for aligning and focusing an image of a reticle onto a semiconductor wafer

UNIV CALIFORNIA

Maskless, reticle-free, lithography

HAWRYLUK ANDREW M

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

MARKLE DAVID A

Maskless digital lithography systems and methods with image motion compensation

PERIODIC STRUCTURES INC

Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist