Inventor
WAKAMOTO SHINJI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “WAKAMOTO SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS5591958AJan 7, 1997
Scanning exposure method and apparatus
NIKON CORP194 citations99
US5502311AMar 26, 1996
Method of and apparatus for detecting plane position
NIKON CORP136 citations98
US5461237AOct 24, 1995
Surface-position setting apparatus
NIKON CORP141 citations98
US5985495ANov 16, 1999
Methods for measuring image-formation characteristics of a projection-optical system
NIKON CORP110 citations97
US6118515ASep 12, 2000
Scanning exposure method
NIKON CORP83 citations96
US5617182AApr 1, 1997
Scanning exposure method
NIKON CORP49 citations96
US6277533B1Aug 21, 2001
Scanning exposure method
NIKON CORP38 citations92
US5510892AApr 23, 1996
Inclination detecting apparatus and method
NIKON CORP42 citations92
US5473166ADec 5, 1995
Inclination detecting apparatus having an intensity adjusting unit
NIKON CORP25 citations92
US6100515AAug 8, 2000
Scanning exposure method and apparatus in which a mask and a substrate are moved at different scan velocities and exposure parameters are varied
NIKON CORP13 citations82
US5635722AJun 3, 1997
Projection exposure method and apparatus capable of performing focus detection with high accuracy
NIKON CORP16 citations74
US7023521B2Apr 4, 2006
Exposure apparatus, exposure method and process for producing device
NIKON CORP2 citations62
US12535747B2Jan 27, 2026
Analyzing method, analysis apparatus, measuring method, measurement apparatus, exposing method, and exposure apparatus
NIKON CORP0 citations49