Inventor

MOROKUMA HIDETOSHI

JP73 patents

⚠️ This page may combine multiple inventors who share the name “MOROKUMA HIDETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOROKUMA HIDETOSHI

HITACHI HIGH TECH CORP

Method and apparatus for observing a specimen

Sample preparation container

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

Pattern measurement apparatus

Pattern displacement measuring method and pattern measuring device

Method and apparatus for creating imaging recipe

Image forming method and charged particle beam apparatus

Method of monitoring an exposure process

Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device

Component analyzer

Scanning electron microscope and a method for imaging a specimen using the same

Method, device and computer program of length measurement

Method and apparatus for observing a specimen

Method and apparatus for measuring shape of a specimen

Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern

Charged particle beam adjusting method and charged particle beam apparatus

Method and apparatus for monitoring exposure process

System and method for detecting defects in a semiconductor during manufacturing thereof

Pattern measuring method and pattern measuring device

Method and apparatus for observing a specimen

Mass spectrometer

Analyzer, ionization apparatus and analyzing method

Image forming method and charged particle beam apparatus

Pattern matching method and computer program for executing pattern matching

Method and apparatus for measuring three-dimensional shape of specimen by using SEM

Method of measuring pattern dimension and method of controlling semiconductor device process

Sample holder for a component analyzer

Mass spectrometer and mass spectrometry

Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device

Pattern matching method and pattern matching program

Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit

HITACHI LTD

Scanning electron microscope

Method and system for monitoring a semiconductor device manufacturing process

Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern

Scanning electron microscope

Scanning electron microscope

Process conditions change monitoring systems that use electron beams, and related monitoring methods

Process conditions change monitoring systems that use electron beams, and related monitoring methods

HITACHI SCIENCE SYSTEMS LTD

Scanning electron microscope

Scanning electron microscope

MOROKUMA HIDETOSHI

Mass spectrometer

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

KUMANO SHUN

Mass spectrometer and mass analyzing method for efficiently ionizing a sample with less carry-over

Mass spectrometer and mass analyzing method

HASHIMOTO YUICHIRO

Mass spectrometer

MATSUOKA RYOICHI

Pattern measurement apparatus

SUTANI TAKUMICHI

Pattern displacement measuring method and pattern measuring device

ISHIGURO KOUJI

Mass spectrometer

MIYAMOTO ATSUSHI

Scanning electron microscope and a method for imaging a specimen using the same

SUGIYAMA MASUYUKI

Mass spectrometry method