Inventor
ARIMA JUNTARO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “ARIMA JUNTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
15 patentsUS6627888B2Sep 30, 2003
Scanning electron microscope
HITACHI LTD30 citations96
US6708072B2Mar 16, 2004
Remote maintenance method, industrial device, and semiconductor device
HITACHI LTD32 citations95
US7551976B2Jun 23, 2009
Industrial device receiving remote maintenance operation and outputting charge information
HITACHI LTD12 citations92
US4725730AFeb 16, 1988
System of automatically measuring sectional shape
HITACHI LTD22 citations82
US6803573B2Oct 12, 2004
Scanning electron microscope
HITACHI LTD6 citations74
US4912328AMar 27, 1990
Apparatus for improving the signal-to-noise ratio of image signals in a scan-type imaging system
HITACHI LTD7 citations74
US7047096B2May 16, 2006
Remote maintenance method, industrial device, and semiconductor device
HITACHI LTD6 citations73
US6954677B2Oct 11, 2005
Remote maintenance method for industrial device that generates maintenance charge information using received charge list
HITACHI LTD4 citations73
US6862485B2Mar 1, 2005
Remote maintenance method, industrial device, and semiconductor device
HITACHI LTD6 citations73
US6792325B2Sep 14, 2004
Remote maintenance method, industrial device, and semiconductor device
HITACHI LTD6 citations73
US6925423B2Aug 2, 2005
Monitoring device and monitoring method for vacuum device
HITACHI LTD6 citations66
US7439505B2Oct 21, 2008
Scanning electron microscope
HITACHI LTD2 citations63
US7002151B2Feb 21, 2006
Scanning electron microscope
HITACHI LTD2 citations63
US7177715B2Feb 13, 2007
Remote maintenance method for generating maintenance charge information, industrial device, and semiconductor device
HITACHI LTD0 citations51
US7117127B2Oct 3, 2006
Monitoring device and monitoring method for vacuum device
HITACHI LTD0 citations45
HITACHI HIGH TECH CORP
4 patentsUS7373501B2May 13, 2008
System and method for on-line diagnostics
HITACHI HIGH TECH CORP18 citations92
US7047093B2May 16, 2006
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
HITACHI HIGH TECH CORP22 citations92
US6901306B2May 31, 2005
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
HITACHI HIGH TECH CORP7 citations73
US7849304B2Dec 7, 2010
System and method for on-line diagnostics
HITACHI HIGH TECH CORP1 citations51