Inventor

HUNG MING-YEON

TW3 patents

⚠️ This page may combine multiple inventors who share the name “HUNG MING-YEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US6069091AMay 30, 2000

In-situ sequential silicon containing hard mask layer/silicon layer plasma etch method

TAIWAN SEMICONDUCTOR MFG65 citations92

US5770523AJun 23, 1998

Method for removal of photoresist residue after dry metal etch

TAIWAN SEMICONDUCTOR MFG37 citations90

TSEN ANDY

1 patent

US8229588B2Jul 24, 2012

Method and system for tuning advanced process control parameters

TSEN ANDY32 citations89