Inventor
FANG WENG-LIANG
TW8 patents
Patents
8 patentsUS6124212ASep 26, 2000
High density plasma (HDP) etch method for suppressing micro-loading effects when etching polysilicon layers
TAIWAN SEMICONDUCTOR MFG101 citations96
US5521119AMay 28, 1996
Post treatment of tungsten etching back
TAIWAN SEMICONDUCTOR MFG29 citations92
US6682659B1Jan 27, 2004
Method for forming corrosion inhibited conductor layer
TAIWAN SEMICONDUCTOR MFG57 citations91
US5783482AJul 21, 1998
Method to prevent oxide peeling induced by sog etchback on the wafer edge
TAIWAN SEMICONDUCTOR MFG25 citations90
US5770523AJun 23, 1998
Method for removal of photoresist residue after dry metal etch
TAIWAN SEMICONDUCTOR MFG37 citations90
US5747856AMay 5, 1998
Vertical channel masked ROM memory cell with epitaxy
TAIWAN SEMICONDUCTOR MFG16 citations81
US6543988B2Apr 8, 2003
Apparatus for clamping and transporting a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG12 citations71
US7141495B2Nov 28, 2006
Methods and forming structures, structures and apparatuses for forming structures
TAIWAN SEMICONDUCTOR MFG3 citations61