Inventor

KIN CHANG-CHING

TW3 patents

⚠️ This page may combine multiple inventors who share the name “KIN CHANG-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US5284549AFeb 8, 1994

Selective fluorocarbon-based RIE process utilizing a nitrogen additive

IBM36 citations91

US5268068ADec 7, 1993

High aspect ratio molybdenum composite mask method

IBM51 citations86

TAIWAN SEMICONDUCTOR MFG

1 patent

US5770523AJun 23, 1998

Method for removal of photoresist residue after dry metal etch

TAIWAN SEMICONDUCTOR MFG37 citations90