Inventor
NIUYA TAKAYUKI
US25 patents
⚠️ This page may combine multiple inventors who share the name “NIUYA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
18 patentsUS6277720B1Aug 21, 2001
Silicon nitride dopant diffusion barrier in integrated circuits
TEXAS INSTRUMENTS INC70 citations95
US6066545AMay 23, 2000
Birdsbeak encroachment using combination of wet and dry etch for isolation nitride
TEXAS INSTRUMENTS INC247 citations94
US5914279AJun 22, 1999
Silicon nitride sidewall and top surface layer separating conductors
TEXAS INSTRUMENTS INC19 citations92
US5563433AOct 8, 1996
French-type semiconductor memory device with enhanced trench capacitor-transistor connection
TEXAS INSTRUMENTS INC22 citations92
US5470778ANov 28, 1995
Method of manufacturing a semiconductor device
TEXAS INSTRUMENTS INC15 citations82
US6268246B1Jul 31, 2001
Method for fabricating a memory cell
TEXAS INSTRUMENTS INC16 citations79
US6617211B1Sep 9, 2003
Method for forming a memory integrated circuit
TEXAS INSTRUMENTS INC7 citations74
US6127214AOct 3, 2000
Contact gate structure and method
TEXAS INSTRUMENTS INC10 citations74
US5861649AJan 19, 1999
Trench-type semiconductor memory device
TEXAS INSTRUMENTS INC9 citations74
US5804478ASep 8, 1998
Method of forming a trench-type semiconductor memory device
TEXAS INSTRUMENTS INC6 citations74
US5470777ANov 28, 1995
Method of fabricating random access memory device having sidewall insulating layer on the laminate structure
TEXAS INSTRUMENTS INC7 citations74
US5210446AMay 11, 1993
Substrate potential generating circuit employing Schottky diodes
TEXAS INSTRUMENTS INC7 citations74
US5317177AMay 31, 1994
Semiconductor device and method of manufacturing the same
TEXAS INSTRUMENTS INC8 citations73
US6835672B1Dec 28, 2004
Selective oxidation for semiconductor device fabrication
TEXAS INSTRUMENTS INC11 citations68
US5675533AOct 7, 1997
Semiconductor device
TEXAS INSTRUMENTS INC13 citations66
US6946701B2Sep 20, 2005
Method for forming a memory integrated circuit with bitlines over gates and capacitors over bitlines
TEXAS INSTRUMENTS INC2 citations63
US6214658B1Apr 10, 2001
Self-aligned contact structure and method
TEXAS INSTRUMENTS INC6 citations63
US6468876B2Oct 22, 2002
Simple stack cell capacitor formation
TEXAS INSTRUMENTS INC2 citations58
TOKYO ELECTRON LTD
6 patentsUS6979655B2Dec 27, 2005
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD22 citations92
US6838370B1Jan 4, 2005
Method of manufacturing semiconductor device and manufacturing apparatus
TOKYO ELECTRON LTD35 citations91
US6514352B2Feb 4, 2003
Cleaning method using an oxidizing agent, chelating agent and fluorine compound
TOKYO ELECTRON LTD43 citations91
US6478035B1Nov 12, 2002
Cleaning device, cleaning system, treating device and cleaning method
TOKYO ELECTRON LTD46 citations91
US6607650B1Aug 19, 2003
Method of forming a plated layer to a predetermined thickness
TOKYO ELECTRON LTD9 citations71
US6875288B2Apr 5, 2005
Cleaning agent and cleaning method
TOKYO ELECTRON LTD6 citations61