P

Inventor

CHENG DAVID

US59 patents
⚠️ This page may combine multiple inventors who share the name “CHENG DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
US5851299ADec 22, 1998

Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions

APPLIED MATERIALS INC402 citations99
US5028565AJul 2, 1991

Process for CVD deposition of tungsten layer on semiconductor wafer

APPLIED MATERIALS INC387 citations99
US5882165AMar 16, 1999

Multiple chamber integrated process system

APPLIED MATERIALS INC789 citations98
US5292393AMar 8, 1994

Multichamber integrated process system

APPLIED MATERIALS INC386 citations98
US5215619AJun 1, 1993

Magnetic field-enhanced plasma etch reactor

APPLIED MATERIALS INC194 citations98
US5186594AFeb 16, 1993

Dual cassette load lock

APPLIED MATERIALS INC199 citations98
US4951601AAug 28, 1990

Multi-chamber integrated process system

APPLIED MATERIALS INC1,271 citations98
US4842683AJun 27, 1989

Magnetic field-enhanced plasma etch reactor

APPLIED MATERIALS INC410 citations98
US5304248AApr 19, 1994

Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions

APPLIED MATERIALS INC189 citations97
US4819167AApr 4, 1989

System and method for detecting the center of an integrated circuit wafer

APPLIED MATERIALS INC279 citations97
US5160402ANov 3, 1992

Multi-channel plasma discharge endpoint detection method

APPLIED MATERIALS INC51 citations96
US4962049AOct 9, 1990

Process for the plasma treatment of the backside of a semiconductor wafer

APPLIED MATERIALS INC56 citations96
US6454519B1Sep 24, 2002

Dual cassette load lock

APPLIED MATERIALS INC42 citations95
US5769588AJun 23, 1998

Dual cassette load lock

APPLIED MATERIALS INC47 citations95
US4911597AMar 27, 1990

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC128 citations95
US4668338AMay 26, 1987

Magnetron-enhanced plasma etching process

APPLIED MATERIALS INC120 citations95
US5280983AJan 25, 1994

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC60 citations94
US4927485AMay 22, 1990

Laser interferometer system for monitoring and controlling IC processing

APPLIED MATERIALS INC83 citations94

(unassigned)

11 patents

KOO ANN F

7 patents

XEROX CORP

4 patents

CHENG DAVID

2 patents

ZILLOW INC

1 patent

MASSACHUSETTS INST TECHNOLOGY

1 patent

KOO ANN

1 patent

PDG INC

1 patent

FRONTIER SEMICONDUCTOR MEASURE

1 patent

ANN KOO FIRST AMERICAN BUILDIN

1 patent

PDG PRODUCT DESIGN GROUP INC

1 patent

Showing the top 50 of 59 patents by PatentIndex Score.