Inventor
CHENG DAVID
US59 patents
⚠️ This page may combine multiple inventors who share the name “CHENG DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS5851299ADec 22, 1998
Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
APPLIED MATERIALS INC402 citations99
US5028565AJul 2, 1991
Process for CVD deposition of tungsten layer on semiconductor wafer
APPLIED MATERIALS INC387 citations99
US5882165AMar 16, 1999
Multiple chamber integrated process system
APPLIED MATERIALS INC789 citations98
US5292393AMar 8, 1994
Multichamber integrated process system
APPLIED MATERIALS INC386 citations98
US5215619AJun 1, 1993
Magnetic field-enhanced plasma etch reactor
APPLIED MATERIALS INC194 citations98
US5186594AFeb 16, 1993
Dual cassette load lock
APPLIED MATERIALS INC199 citations98
US4951601AAug 28, 1990
Multi-chamber integrated process system
APPLIED MATERIALS INC1,271 citations98
US4842683AJun 27, 1989
Magnetic field-enhanced plasma etch reactor
APPLIED MATERIALS INC410 citations98
US5304248AApr 19, 1994
Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
APPLIED MATERIALS INC189 citations97
US4819167AApr 4, 1989
System and method for detecting the center of an integrated circuit wafer
APPLIED MATERIALS INC279 citations97
US5160402ANov 3, 1992
Multi-channel plasma discharge endpoint detection method
APPLIED MATERIALS INC51 citations96
US4962049AOct 9, 1990
Process for the plasma treatment of the backside of a semiconductor wafer
APPLIED MATERIALS INC56 citations96
US6454519B1Sep 24, 2002
Dual cassette load lock
APPLIED MATERIALS INC42 citations95
US5769588AJun 23, 1998
Dual cassette load lock
APPLIED MATERIALS INC47 citations95
US4911597AMar 27, 1990
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC128 citations95
US4668338AMay 26, 1987
Magnetron-enhanced plasma etching process
APPLIED MATERIALS INC120 citations95
US5280983AJan 25, 1994
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC60 citations94
US4927485AMay 22, 1990
Laser interferometer system for monitoring and controlling IC processing
APPLIED MATERIALS INC83 citations94
(unassigned)
11 patentsUS6164894ADec 26, 2000
Method and apparatus for integrated wafer handling and testing
448 citations99
US5670888ASep 23, 1997
Method for transporting and testing wafers
153 citations99
US6280581B1Aug 28, 2001
Method and apparatus for electroplating films on semiconductor wafers
99 citations98
US6053688AApr 25, 2000
Method and apparatus for loading and unloading wafers from a wafer carrier
98 citations98
US5546179AAug 13, 1996
Method and apparatus for mapping the edge and other characteristics of a workpiece
119 citations98
US5691648ANov 25, 1997
Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
61 citations96
US6366103B1Apr 2, 2002
Multiple test probe system
16 citations93
US6249342B1Jun 19, 2001
Method and apparatus for handling and testing wafers
50 citations93
US6154041ANov 28, 2000
Method and apparatus for measuring thickness of semiconductor substrates
23 citations93
US5914611AJun 22, 1999
Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
31 citations93
US5495178AFeb 27, 1996
Method and apparatus for measuring film thickness
10 citations74
KOO ANN F
7 patentsUS5452078ASep 19, 1995
Method and apparatus for finding wafer index marks and centers
KOO ANN F70 citations96
US5708279AJan 13, 1998
Method and apparatus for measuring surface topography
KOO ANN F27 citations92
US5523582AJun 4, 1996
Method and apparatus for measuring the curvature of wafers with a laser source selecting device
KOO ANN F23 citations92
US5270560ADec 14, 1993
Method and apparatus for measuring workpiece surface topography
KOO ANN F31 citations92
US5917191AJun 29, 1999
Apparatus for measuring surface topography
KOO ANN F6 citations74
US5696383ADec 9, 1997
Method and apparatus for measuring the curvature of wafers with beams of different wavelengths
KOO ANN F15 citations74
US5369286ANov 29, 1994
Method and apparatus for measuring stress in a film applied to surface of a workpiece
KOO ANN F8 citations74
XEROX CORP
4 patentsUS4466087AAug 14, 1984
Optical memory system for a reading/writing, verifying and tracking module
XEROX CORP21 citations82
US4496957AJan 29, 1985
Optical disk
XEROX CORP16 citations74
US4394667AJul 19, 1983
Radial access drive for an optical disk recorder
XEROX CORP10 citations73
US4130898ADec 19, 1978
Motion blur compensation for moving media optical data recording system
XEROX CORP8 citations72
CHENG DAVID
2 patentsZILLOW INC
1 patentMASSACHUSETTS INST TECHNOLOGY
1 patentKOO ANN
1 patentPDG INC
1 patentFRONTIER SEMICONDUCTOR MEASURE
1 patentANN KOO FIRST AMERICAN BUILDIN
1 patentPDG PRODUCT DESIGN GROUP INC
1 patentShowing the top 50 of 59 patents by PatentIndex Score.