Inventor

MCANINCH JEFFREY E

US3 patents

Patents

3 patents

US7061614B2Jun 13, 2006

Measurement system with separate optimized beam paths

THERMA WAVE INC43 citations91

US6813026B2Nov 2, 2004

Purge system for optical metrology tool

THERMA WAVE INC36 citations88

US7227637B2Jun 5, 2007

Measurement system with separate optimized beam paths

THERMA WAVE INC6 citations72