Inventor
UEYAMA TSUTOMU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “UEYAMA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
13 patentsUS5916366AJun 29, 1999
Substrate spin treating apparatus
DAINIPPON SCREEN MFG130 citations98
US5571325ANov 5, 1996
Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus
DAINIPPON SCREEN MFG235 citations98
US6859616B2Feb 22, 2005
Apparatus for and method of heat treatment by light irradiation
DAINIPPON SCREEN MFG38 citations92
US4757223AJul 12, 1988
Linear actuator
DAINIPPON SCREEN MFG37 citations92
US6893805B2May 17, 2005
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG20 citations91
US4743792AMay 10, 1988
Piezoelectric motor
DAINIPPON SCREEN MFG20 citations81
US4642701AFeb 10, 1987
Device of switching a scanning beam diameter
DAINIPPON SCREEN MFG20 citations81
US4707123ANov 17, 1987
Film end holding device
DAINIPPON SCREEN MFG11 citations73
US6926057B2Aug 9, 2005
Thin film forming apparatus and thin film forming method
DAINIPPON SCREEN MFG9 citations72
US4770404ASep 13, 1988
Method and device for loading and unloading a film on and out of a rotary drum in the exposure/recording apparatus
DAINIPPON SCREEN MFG10 citations72
US6918421B2Jul 19, 2005
Thin film forming apparatus and thin film forming method
DAINIPPON SCREEN MFG2 citations61
US4847634AJul 11, 1989
Method and apparatus for correcting snaking in a rollfilm feeding apparatus
DAINIPPON SCREEN MFG2 citations58
US6911088B2Jun 28, 2005
Substrate processing apparatus and slit nozzle
DAINIPPON SCREEN MFG0 citations36