Inventor
GUAN GEORGE
US6 patents
Patents
6 patentsUS6306807B1Oct 23, 2001
Boric acid containing compositions for stripping residues from semiconductor substrates
ADVANCED TECH MATERIALS38 citations95
US6224785B1May 1, 2001
Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates
ADVANCED TECH MATERIALS84 citations95
US6875733B1Apr 5, 2005
Ammonium borate containing compositions for stripping residues from semiconductor substrates
ADVANCED TECH MATERIALS31 citations91
US6211126B1Apr 3, 2001
Formulations including a 1, 3-dicarbonyl compound chelating agent for stripping residues from semiconductor substrates
ADVANCED TECH MATERIALS47 citations91
US6492310B2Dec 10, 2002
Boric acid containing compositions for stripping residues from semiconductor substrates
ADVANCED TECH MATERIALS6 citations73
US6599870B2Jul 29, 2003
Boric acid containing compositions for stripping residues from semiconductor substrates
ADVANCED TECH MATERIALS2 citations62