Inventor
KUNI ASAHIRO
JP41 patents
⚠️ This page may combine multiple inventors who share the name “KUNI ASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
38 patentsUS5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6587581B1Jul 1, 2003
Visual inspection method and apparatus therefor
HITACHI LTD118 citations98
US6465781B1Oct 15, 2002
Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus
HITACHI LTD85 citations97
US6347150B1Feb 12, 2002
Method and system for inspecting a pattern
HITACHI LTD52 citations96
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US4666291AMay 19, 1987
Light-exposure apparatus
HITACHI LTD57 citations96
US7133550B2Nov 7, 2006
Pattern inspection method and apparatus
HITACHI LTD19 citations93
US6975754B2Dec 13, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD19 citations93
US6898305B2May 24, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD40 citations93
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US4095905AJun 20, 1978
Surface-defect detecting device
HITACHI LTD33 citations93
US7269280B2Sep 11, 2007
Method and its apparatus for inspecting a pattern
HITACHI LTD22 citations92
US6507029B1Jan 14, 2003
Sample processing apparatus and method for removing charge on sample through light irradiation
HITACHI LTD20 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US4814615AMar 21, 1989
Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure
HITACHI LTD31 citations92
US4777641AOct 11, 1988
Method and apparatus for alignment
HITACHI LTD27 citations92
US4447731AMay 8, 1984
Exterior view examination apparatus
HITACHI LTD45 citations92
US4213117AJul 15, 1980
Method and apparatus for detecting positions of chips on a semiconductor wafer
HITACHI LTD49 citations92
US5463667AOct 31, 1995
Inspection method for soldered joints using x-ray imaging and apparatus therefor
HITACHI LTD25 citations90
US4153371AMay 8, 1979
Method and apparatus for reduction-projection type mask alignment
HITACHI LTD55 citations90
US7266235B2Sep 4, 2007
Pattern inspection method and apparatus
HITACHI LTD10 citations84
US6828554B2Dec 7, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD11 citations82
US4788577ANov 29, 1988
Substrate surface deflecting device
HITACHI LTD22 citations82
US4242702ADec 30, 1980
Apparatus for automatically checking external appearance of object
HITACHI LTD21 citations82
US7957579B2Jun 7, 2011
Pattern inspection method and apparatus
HITACHI LTD5 citations74
US7894658B2Feb 22, 2011
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US7457453B2Nov 25, 2008
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US7439504B2Oct 21, 2008
Pattern inspection method and apparatus using electron beam
HITACHI LTD6 citations74
US7122796B2Oct 17, 2006
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD4 citations74
US6940069B2Sep 6, 2005
Pattern inspection method and apparatus using electron beam
HITACHI LTD6 citations74
US6614022B2Sep 2, 2003
Pattern inspection method and apparatus using electron beam
HITACHI LTD11 citations74
US6376854B2Apr 23, 2002
Method of inspecting a pattern on a substrate
HITACHI LTD8 citations74
US4556797ADec 3, 1985
Method and apparatus for detecting edge of fine pattern on specimen
HITACHI LTD11 citations74
US4504045AMar 12, 1985
Wafer transforming device
HITACHI LTD16 citations74
US4708484ANov 24, 1987
Projection alignment method and apparatus
HITACHI LTD8 citations71
US7049587B2May 23, 2006
Apparatus for inspecting a specimen
HITACHI LTD2 citations62