Inventor
BERGER LARRY L
US6 patents
⚠️ This page may combine multiple inventors who share the name “BERGER LARRY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DU PONT
4 patentsUS7108953B2Sep 19, 2006
Dissolution inhibitors in photoresist compositions for microlithography
DU PONT7 citations73
US6974657B2Dec 13, 2005
Compositions for microlithography
DU PONT10 citations72
US7205086B2Apr 17, 2007
Multilayer elements containing photoresist compositions and their use in microlithography
DU PONT3 citations60
US7045268B2May 16, 2006
Polymers blends and their use in photoresist compositions for microlithography
DU PONT2 citations60