Inventor
SOBUKAWA HIROSI
JP45 patents
⚠️ This page may combine multiple inventors who share the name “SOBUKAWA HIROSI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
37 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7420164B2Sep 2, 2008
Objective lens, electron beam system and method of inspecting defect
EBARA CORP68 citations98
US7244932B2Jul 17, 2007
Electron beam apparatus and device fabrication method using the electron beam apparatus
EBARA CORP74 citations98
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7601972B2Oct 13, 2009
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP49 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US7223973B2May 29, 2007
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP38 citations96
US7135676B2Nov 14, 2006
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP61 citations96
US7049585B2May 23, 2006
Sheet beam-type testing apparatus
EBARA CORP55 citations96
US8053726B2Nov 8, 2011
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP11 citations93
US7928378B2Apr 19, 2011
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP17 citations93
US7569838B2Aug 4, 2009
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP23 citations93
US7417236B2Aug 26, 2008
Sheet beam-type testing apparatus
EBARA CORP20 citations93
US7408175B2Aug 5, 2008
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP19 citations93
US7385197B2Jun 10, 2008
Electron beam apparatus and a device manufacturing method using the same apparatus
EBARA CORP30 citations93
US7351969B2Apr 1, 2008
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP37 citations93
US7297949B2Nov 20, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP28 citations93
US7129485B2Oct 31, 2006
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP30 citations93
US7109484B2Sep 19, 2006
Sheet beam-type inspection apparatus
EBARA CORP23 citations93
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US7439502B2Oct 21, 2008
Electron beam apparatus and device production method using the electron beam apparatus
EBARA CORP23 citations92
US7247848B2Jul 24, 2007
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP28 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US8803103B2Aug 12, 2014
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP6 citations84
US7888642B2Feb 15, 2011
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP9 citations84
US7863580B2Jan 4, 2011
Electron beam apparatus and an aberration correction optical apparatus
EBARA CORP7 citations84
US7829871B2Nov 9, 2010
Sheet beam-type testing apparatus
EBARA CORP10 citations84
US7025005B2Apr 11, 2006
Stage device and angle detecting device
EBARA CORP17 citations84
US8368031B2Feb 5, 2013
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP3 citations74
US7423267B2Sep 9, 2008
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP8 citations74
US6217278B1Apr 17, 2001
Turbomolecular pump
EBARA CORP10 citations73
US7952071B2May 31, 2011
Apparatus and method for inspecting sample surface
EBARA CORP3 citations63
US7745784B2Jun 29, 2010
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP4 citations62
NOJI NOBUHARU
3 patentsUS8742341B2Jun 3, 2014
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
NOJI NOBUHARU4 citations82
US8859984B2Oct 14, 2014
Method and apparatus for inspecting sample surface
NOJI NOBUHARU2 citations61
US8525127B2Sep 3, 2013
Method and apparatus for inspecting sample surface
NOJI NOBUHARU3 citations61