Inventor
YOSHIKAWA SHOJI
JP83 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
29 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7928382B2Apr 19, 2011
Detector and inspecting apparatus
EBARA CORP51 citations98
US7244932B2Jul 17, 2007
Electron beam apparatus and device fabrication method using the electron beam apparatus
EBARA CORP74 citations98
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7601972B2Oct 13, 2009
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP49 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US7223973B2May 29, 2007
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP38 citations96
US7135676B2Nov 14, 2006
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP61 citations96
US7049585B2May 23, 2006
Sheet beam-type testing apparatus
EBARA CORP55 citations96
US8053726B2Nov 8, 2011
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP11 citations93
US7928378B2Apr 19, 2011
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP17 citations93
US7569838B2Aug 4, 2009
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP23 citations93
US7417236B2Aug 26, 2008
Sheet beam-type testing apparatus
EBARA CORP20 citations93
US7411191B2Aug 12, 2008
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP20 citations93
US7408175B2Aug 5, 2008
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP19 citations93
US7351969B2Apr 1, 2008
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP37 citations93
US7297949B2Nov 20, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP28 citations93
US7157703B2Jan 2, 2007
Electron beam system
EBARA CORP29 citations93
US7129485B2Oct 31, 2006
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP30 citations93
US7109484B2Sep 19, 2006
Sheet beam-type inspection apparatus
EBARA CORP23 citations93
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US7439502B2Oct 21, 2008
Electron beam apparatus and device production method using the electron beam apparatus
EBARA CORP23 citations92
US7247848B2Jul 24, 2007
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP28 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US8803103B2Aug 12, 2014
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP6 citations84
OLYMPUS OPTICAL CO
10 patentsUS4464050AAug 7, 1984
Apparatus for detecting optically defects
OLYMPUS OPTICAL CO66 citations95
US5109367AApr 28, 1992
Optical information recording and reproducing apparatus performing focus and/or track control by normalized error signals
OLYMPUS OPTICAL CO25 citations93
US5048002ASep 10, 1991
Photodisc apparatus with means for canceling offset of tracking servo loop
OLYMPUS OPTICAL CO29 citations93
US5014256AMay 7, 1991
Photodisc apparatus with gain control of tracking servo loop
OLYMPUS OPTICAL CO30 citations93
US4797866AJan 10, 1989
Optical recording/reproducing apparatus
OLYMPUS OPTICAL CO32 citations93
US4577320AMar 18, 1986
Light power controlling apparatus
OLYMPUS OPTICAL CO50 citations93
US4571728AFeb 18, 1986
Temperature control device for a semiconductor laser
OLYMPUS OPTICAL CO38 citations93
US4692606ASep 8, 1987
Modulated light source with power stabilized according to data signal
OLYMPUS OPTICAL CO51 citations92
US4505585AMar 19, 1985
System for detecting defects on an optical surface
OLYMPUS OPTICAL CO55 citations92
US4651314AMar 17, 1987
Optical recording and reproducing equipment
OLYMPUS OPTICAL CO36 citations91
MITSUBISHI ELECTRIC CORP
5 patentsUS6166684ADec 26, 2000
Artificial satellite navigation system and method
MITSUBISHI ELECTRIC CORP66 citations94
US6480787B2Nov 12, 2002
GPS receiving system
MITSUBISHI ELECTRIC CORP26 citations91
US6227496B1May 8, 2001
Attitude determination system for artificial satellite
MITSUBISHI ELECTRIC CORP24 citations91
US6102338AAug 15, 2000
Attitude determination system for artificial satellite
MITSUBISHI ELECTRIC CORP43 citations91
US6523786B2Feb 25, 2003
Apparatus for determining attitude of artificial satellite
MITSUBISHI ELECTRIC CORP21 citations89
TOSHIBA KK
2 patentsNIKON CORP
1 patentHATAKEYAMA MASAHIRO
1 patentKIMBA TOSHIFUMI
1 patentNIPPON KOKAN KK
1 patentShowing the top 50 of 83 patents by PatentIndex Score.