Inventor

SUGIHARA KAZUYOSHI

JP38 patents

⚠️ This page may combine multiple inventors who share the name “SUGIHARA KAZUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUGIHARA KAZUYOSHI

TOSHIBA KK

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Charged particle beam system and pattern slant observing method

Method of repairing defect of structure

Pattern forming method

Mask defect repair system and method which controls a dose of a particle beam

Pattern forming method using alignment from latent image or base pattern on substrate

Focused ion beam deposition using TMCTS

Charged beam apparatus

Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus

Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same

Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same

Pattern forming method

Photomask repair method and apparatus

Charged beam drawing apparatus

Pattern-forming method and lithographic system

Mask defect repair system and method

Charged beam drawing apparatus

Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same

Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same

Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part

Piezoelectric precise rotation mechanism for slightly rotating an object

Electron beam pattern transfer device and method for aligning mask and semiconductor wafer

Pattern forming method

Pattern-forming method and lithographic system

Charged beam applying apparatus

Method of evaluating shaped beam of charged beam writer and method of forming pattern

TOKYO SHIBAURA ELECTRIC CO

IC Tester using an electron beam capable of easily setting a probe card unit for wafers &amp; packaged IC&#39;s to be tested

Precision rotation mechanism

Electron beam pattern transfer system having an autofocusing mechanism

Electron-beam image transfer device

MITSUBISHI ELECTRIC CORP

Residual current operated circuit-breaker

Handle lock device for a switch

Circuit breaker

Tripping device with burning prevention switch

EBARA CORP

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Electron beam inspection system and inspection method and method of manufacturing devices using the system

TOSHIBA MACHINE CO LTD

Cassette retaining device of electron beam apparatus

SUGIHARA KAZUYOSHI

Printing device, printing method and computer-readable storage medium storing program for executing the printing method

IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested