Inventor
YANAGISAWA AKIO
JP2 patents
Patents
2 patentsUS7196211B2Mar 27, 2007
Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same
MITSUBISHI MATERIALS CORP7 citations70
US7045645B2May 16, 2006
Ruthenium compounds, process for their preparation, and ruthenium-containing thin films made by using the compounds
MITSUBISHI MATERIALS CORP1 citations49