Inventor
SIEVERS MICHAEL R
US12 patents
⚠️ This page may combine multiple inventors who share the name “SIEVERS MICHAEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS7859013B2Dec 28, 2010
Metal oxide field effect transistor with a sharp halo
IBM100 citations98
US7119333B2Oct 10, 2006
Ion detector for ion beam applications
IBM34 citations91
US6730237B2May 4, 2004
Focused ion beam process for removal of copper
IBM21 citations89
US6900137B2May 31, 2005
Dry etch process to edit copper lines
IBM10 citations68
US7384835B2Jun 10, 2008
Metal oxide field effect transistor with a sharp halo and a method of forming the transistor
IBM3 citations63
US7285775B2Oct 23, 2007
Endpoint detection for the patterning of layered materials
IBM0 citations51
US7278300B2Oct 9, 2007
Gas filled reactive atomic force microscope probe
IBM0 citations51
US7256399B2Aug 14, 2007
Non-destructive in-situ elemental profiling
IBM0 citations51
US6843893B2Jan 18, 2005
Metal dry etch using electronic field
IBM0 citations51
US8008209B2Aug 30, 2011
Thermal gradient control of high aspect ratio etching and deposition processes
IBM0 citations36