Inventor
MALINEN TIMO
FI16 patents
⚠️ This page may combine multiple inventors who share the name “MALINEN TIMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PICOSUN OY
13 patentsUS9868131B2Jan 16, 2018
Atomic layer deposition with plasma source
PICOSUN OY414 citations98
US9869020B2Jan 16, 2018
Protecting a target pump interior with an ALD coating
PICOSUN OY9 citations76
US9745661B2Aug 29, 2017
Method and apparatus for forming a substrate web track in an atomic layer deposition reactor
PICOSUN OY4 citations71
US10329662B2Jun 25, 2019
Protecting an interior of a hollow body with an ALD coating
PICOSUN OY2 citations65
US12383923B2Aug 12, 2025
Atomic layer deposition with plasma source
PICOSUN OY0 citations62
US12297535B2May 13, 2025
Substrate processing methods and apparatus
PICOSUN OY0 citations61
US11970774B2Apr 30, 2024
Method of operating a deposition or cleaning apparatus
PICOSUN OY0 citations61
US11725279B2Aug 15, 2023
Deposition or cleaning apparatus with movable structure
PICOSUN OY0 citations61
US10597778B2Mar 24, 2020
ALD method and apparatus including a photon source
PICOSUN OY1 citations61
US12110588B2Oct 8, 2024
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US11505864B2Nov 22, 2022
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US10619241B2Apr 14, 2020
ALD method and apparatus
PICOSUN OY1 citations57
US12325915B2Jun 10, 2025
Substrate processing apparatus and method
PICOSUN OY0 citations53