Inventor
SAWADA KAZUYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SAWADA KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
8 patentsUS5989998ANov 23, 1999
Method of forming interlayer insulating film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD254 citations99
US7060323B2Jun 13, 2006
Method of forming interlayer insulating film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD38 citations96
US6558756B2May 6, 2003
Method of forming interlayer insulating film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD42 citations96
US4977104ADec 11, 1990
Method for producing a semiconductor device by filling hollows with thermally decomposed doped and undoped polysilicon
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD97 citations95
US5174858ADec 29, 1992
Method of forming contact structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD39 citations92
US6416609B1Jul 9, 2002
Process and apparatus of producing optical disk and process of producing substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16 citations91
US6835270B2Dec 28, 2004
Process and apparatus of producing optical disk and process of producing substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations51
US7301179B2Nov 27, 2007
Semiconductor device having a high breakdown voltage transistor formed thereon
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations41
PANASONIC CORP
4 patentsUS7473929B2Jan 6, 2009
Semiconductor device and method for fabricating the same
PANASONIC CORP23 citations92
US7759711B2Jul 20, 2010
Semiconductor device with substrate having increased resistance due to lattice defect and method for fabricating the same
PANASONIC CORP2 citations62
US7846828B2Dec 7, 2010
Semiconductor device and method for fabricating the same
PANASONIC CORP1 citations52
US7851871B2Dec 14, 2010
Semiconductor device and method for fabricating the same
PANASONIC CORP1 citations50