Inventor
URITSKY YURI S
US7 patents
Patents
7 patentsUS5497007AMar 5, 1996
Method for automatically establishing a wafer coordinate system
APPLIED MATERIALS INC92 citations95
US5422724AJun 6, 1995
Multiple-scan method for wafer particle analysis
APPLIED MATERIALS INC56 citations95
US5381004AJan 10, 1995
Particle analysis of notched wafers
APPLIED MATERIALS INC79 citations95
US5267017ANov 30, 1993
Method of particle analysis on a mirror wafer
APPLIED MATERIALS INC48 citations92
US7963153B2Jun 21, 2011
Non-destructive ambient dynamic mode AFM amplitude versus distance curve acquisition
APPLIED MATERIALS INC8 citations81
US5628870AMay 13, 1997
Method for marking a substrate using ionized gas
APPLIED MATERIALS INC2 citations62
US7509844B2Mar 31, 2009
Atomic force microscope technique for minimal tip damage
APPLIED MATERIALS INC5 citations57