Inventor
SWEDEK BOGDAN
US13 patents
Patents
13 patentsUS7764377B2Jul 27, 2010
Spectrum based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC48 citations98
US7226339B2Jun 5, 2007
Spectrum based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC26 citations96
US7998358B2Aug 16, 2011
Peak-based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC14 citations92
US7727049B2Jun 1, 2010
Friction sensor for polishing system
APPLIED MATERIALS INC18 citations92
US7614933B2Nov 10, 2009
Polishing pad assembly with glass or crystalline window
APPLIED MATERIALS INC10 citations92
US7306507B2Dec 11, 2007
Polishing pad assembly with glass or crystalline window
APPLIED MATERIALS INC17 citations92
US7210980B2May 1, 2007
Sealed polishing pad, system and methods
APPLIED MATERIALS INC20 citations92
US7112119B1Sep 26, 2006
Sealed polishing pad methods
APPLIED MATERIALS INC29 citations92
US7163437B1Jan 16, 2007
System with sealed polishing pad
APPLIED MATERIALS INC12 citations84
US7938714B2May 10, 2011
Polishing pad assembly with glass or crystalline window
APPLIED MATERIALS INC2 citations74
US7651385B2Jan 26, 2010
Polishing system with optical head
APPLIED MATERIALS INC2 citations74
US7614936B2Nov 10, 2009
Spectrum based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC5 citations74
US7931522B2Apr 26, 2011
Removable optical monitoring system for chemical mechanical polishing
APPLIED MATERIALS INC0 citations63